DocumentCode :
3531970
Title :
Implementing The Results Of A Manufacturing Simulation In A Semiconductor Line
Author :
Miller, David J.
Author_Institution :
IBM General Technology Division
fYear :
1989
fDate :
4-6 Dec 1989
Firstpage :
922
Lastpage :
929
Keywords :
Analytical models; Contamination; Costs; Lead compounds; Manufacturing processes; Process control; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference Proceedings, 1989. Winter
Print_ISBN :
0-911801-58-8
Type :
conf
DOI :
10.1109/WSC.1989.718774
Filename :
718774
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3531970
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