Fast, Chemically Amplified Epoxy Novolac Photoresist Soft X-Ray Contact Microscopy of Living Biological Species

Author

Argitis, P. ; Cefalas, A.C. ; Kollia, Z. ; Sarantopoulou, E. ; Ford, T.W. ; Stead, A.D. ; Marranca, A. ; Danson, C.N. ; Knott, J. ; Neely, David

Author_Institution

Institute of Microelectronics

fYear

1998

fDate

14-18 Sept. 1998

Firstpage

Lastpage

Keywords

Chemicals; Microscopy; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

DOI

10.1109/CLEOE.1998.718890

Filename

718890

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