DocumentCode :
3532646
Title :
Fast, Chemically Amplified Epoxy Novolac Photoresist Soft X-Ray Contact Microscopy of Living Biological Species
Author :
Argitis, P. ; Cefalas, A.C. ; Kollia, Z. ; Sarantopoulou, E. ; Ford, T.W. ; Stead, A.D. ; Marranca, A. ; Danson, C.N. ; Knott, J. ; Neely, David
Author_Institution :
Institute of Microelectronics
fYear :
1998
fDate :
14-18 Sept. 1998
Firstpage :
17
Lastpage :
17
Keywords :
Chemicals; Microscopy; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
Type :
conf
DOI :
10.1109/CLEOE.1998.718890
Filename :
718890
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3532646
