DocumentCode
3533560
Title
The Casimir effect on silicon micromechanical systems: Forces due to virtual photons
Author
Chan, H.B. ; Bao, Y. ; Zou, J.
Author_Institution
Dept. of Phys., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
29
Lastpage
30
Abstract
The Casimir force arising from quantum fluctuations could become the dominant interaction in silicon micromechanical devices under the appropriate conditions. The measured force is distinct from the pairwise summation of van der Waals forces.
Keywords
Casimir effect; elemental semiconductors; micro-optomechanical devices; silicon; van der Waals forces; Casimir effect; Si; silicon micromechanical systems; van der Waals forces; virtual photons; Casimir effect; Corrugated surfaces; Force; Force measurement; Gold; Silicon; Surface treatment; Casimir forces; force sensors; quantum fluctuations; surface interactions;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318786
Filename
6318786
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