• DocumentCode
    3533560
  • Title

    The Casimir effect on silicon micromechanical systems: Forces due to virtual photons

  • Author

    Chan, H.B. ; Bao, Y. ; Zou, J.

  • Author_Institution
    Dept. of Phys., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
  • fYear
    2012
  • fDate
    6-9 Aug. 2012
  • Firstpage
    29
  • Lastpage
    30
  • Abstract
    The Casimir force arising from quantum fluctuations could become the dominant interaction in silicon micromechanical devices under the appropriate conditions. The measured force is distinct from the pairwise summation of van der Waals forces.
  • Keywords
    Casimir effect; elemental semiconductors; micro-optomechanical devices; silicon; van der Waals forces; Casimir effect; Si; silicon micromechanical systems; van der Waals forces; virtual photons; Casimir effect; Corrugated surfaces; Force; Force measurement; Gold; Silicon; Surface treatment; Casimir forces; force sensors; quantum fluctuations; surface interactions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
  • Conference_Location
    Banff, AB
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-1511-2
  • Type

    conf

  • DOI
    10.1109/OMEMS.2012.6318786
  • Filename
    6318786