Title :
A flexible liquid microlens based on electrowetting
Author :
Li, Chenhui ; Jiang, Hongrui
Author_Institution :
Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
We report on a flexible liquid microlens actuated by electrowetting mechanism. The microlens structure is made of soft polymer and its substrate is made much thinner than the lens to reduce the stress on the lens when it is stretched on a curved surface. A low-temperature fabrication process is developed to reduce the stress in the polymer. The focal length f can be varied between -14 mm and 33 mm. The lens can resolve 11.30 line pairs per mm at f = 33 mm according to a 1951 USAF resolution chart test and the response time of the lens is approximately 50 ms.
Keywords :
flexible structures; low-temperature techniques; micro-optomechanical devices; microfluidics; microlenses; optical fabrication; optical focusing; optical polymers; wetting; USAF resolution chart test; curved surface; electrowetting; flexible liquid microlens; focal length; low-temperature fabrication; response time; soft polymer; Fabrication; Lenses; Liquids; Microoptics; Stress; Substrates; Surface treatment; electrowetting; flexible; liquid microlens;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318801
