Title :
Scanning probe microscopy for x-ray optics examination
Author :
Yu, J. ; Cao, I.L. ; Namba, Y. ; Ma, Y.Y.
Keywords :
Atom optics; Mirrors; Nonhomogeneous media; Optical films; Optical surface waves; Rough surfaces; Scanning probe microscopy; Semiconductor films; Surface roughness; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527228