• DocumentCode
    3533834
  • Title

    Subwavelength silicon honeycomb structure for tailored index in terahertz broadband region

  • Author

    Park, Sang-Gil ; Jin, Kyong-Hwan ; Yi, Minwoo ; Ye, Jong Chul ; Ahn, Jaewook ; Jeong, Ki-Hun

  • Author_Institution
    Dept. of Bio & Brain Eng., KAIST, Daejeon, South Korea
  • fYear
    2012
  • fDate
    6-9 Aug. 2012
  • Firstpage
    75
  • Lastpage
    76
  • Abstract
    This work presents tailored index in terahertz broadband frequency by a subwavelength silicon honeycomb structures. The structure is fabricated by deep reactive ion etching process and their indices are tailored depending on size of structures.
  • Keywords
    elemental semiconductors; integrated optics; refractive index; silicon; sputter etching; Si; deep reactive ion etching process; subwavelength honeycomb structure; tailored index; terahertz broadband region; Broadband communication; Honeycomb structures; Indexes; Silicon; Spectroscopy; Time domain analysis; Terahertz wave; effective medium; tailored index;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
  • Conference_Location
    Banff, AB
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-1511-2
  • Type

    conf

  • DOI
    10.1109/OMEMS.2012.6318809
  • Filename
    6318809
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3533834