DocumentCode
3534025
Title
High fill factor MEMS mirror array
Author
Buswell, Steven ; Lam, Lawrence ; Zhou, Tiansheng
Author_Institution
Preciseley Microtechnol. Corp., Edmonton, AB, Canada
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
101
Lastpage
102
Abstract
The design, fabrication, and quasi-static testing of a high fill factor electrostatically actuated MEMS mirror array with application to spectrometry are presented. Mirror inclination with applied voltage is demonstrated by optical profilometry.
Keywords
micro-optomechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; optical testing; spectrometer accessories; MEMS mirror array; design; electrostatic actuator; fabrication; fill factor; mirror inclination; optical profilometry; quasistatic testing; spectrometry; Actuators; Arrays; Cavity resonators; Fabrication; Micromechanical devices; Mirrors; Silicon; MEMS Tunable Filter; Mirror Array; Spectrometer; Wavelength Selective Switch (WSS);
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318822
Filename
6318822
Link To Document