Title :
High fill factor MEMS mirror array
Author :
Buswell, Steven ; Lam, Lawrence ; Zhou, Tiansheng
Author_Institution :
Preciseley Microtechnol. Corp., Edmonton, AB, Canada
Abstract :
The design, fabrication, and quasi-static testing of a high fill factor electrostatically actuated MEMS mirror array with application to spectrometry are presented. Mirror inclination with applied voltage is demonstrated by optical profilometry.
Keywords :
micro-optomechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; optical testing; spectrometer accessories; MEMS mirror array; design; electrostatic actuator; fabrication; fill factor; mirror inclination; optical profilometry; quasistatic testing; spectrometry; Actuators; Arrays; Cavity resonators; Fabrication; Micromechanical devices; Mirrors; Silicon; MEMS Tunable Filter; Mirror Array; Spectrometer; Wavelength Selective Switch (WSS);
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318822
