Title :
Optical profiling using a miniature michelson interferometer as an optical probe
Author :
Malak, Maurine ; Marty, Frédéric ; Nouira, Hichem ; Salgado, José ; Bourouina, Tarik
Author_Institution :
Lab. ESYCOM, Univ. Paris-Est, Noisy-Le-Grand, France
Abstract :
We report about profile measurements using miniaturized Michelson interferometer acting as optical probe. Two characterization techniques were deployed: FFT of spectral response and monochromatic light. Resulting profiles are compared with those obtained by commercial equipments.
Keywords :
Michelson interferometers; fast Fourier transforms; monochromators; optical variables measurement; probes; fast Fourier transform; miniature Michelson interferometer; monochromatic light; optical probe; optical profiling; profile measurements; spectral response; Optical device fabrication; Optical fibers; Optical interferometry; Optical reflection; Optical variables measurement; Probes; Bragg reflectors; Michelson interferometer; Optical Profiling; all-silicon optical probe; dimensional measurement;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318826
