DocumentCode
3534118
Title
Large micromirror array designed and tested for multi-object spectroscopy
Author
Canonica, Michael ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried
Author_Institution
Ecole Polytech. Fed. de Lausanne, Neuchatel, Switzerland
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
115
Lastpage
116
Abstract
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.
Keywords
astronomical spectra; cryogenics; micromechanical devices; micromirrors; optical design techniques; optical testing; MEMS based programmable slit masks; cryogenic operation ability; micromirror array; multiobject spectroscopy; optical design; optical testing; surface flatness; Arrays; Cryogenics; Extraterrestrial measurements; Micromirrors; Silicon; Spectroscopy; MEMS; MOEMS; cryogenic application; large array; micromirror; multi-object spectroscopy; programmable slit mask;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318829
Filename
6318829
Link To Document