Title :
Electrostatic-pneumatic MEMS deformable mirror for focus control
Author :
Moghimi, Mohammad J. ; Wilson, Chris ; Dickensheets, David L.
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT, USA
Abstract :
A novel actuation scheme for MEMS deformable mirrors is presented in this paper. In this method electrostatic actuation is combined with pneumatic actuation to achieve either concave or convex surface curvature and to increase the optical focus range of the mirrors. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The principle of the operation, fabrication process and deflection curves are presented.
Keywords :
deformation; electrostatic actuators; micro-optomechanical devices; micromirrors; optical control; optical fabrication; pneumatic actuators; shape control; actuation scheme; concave surface curvature; convex surface curvature; deflection curves; electrostatic actuation; electrostatic pneumatic MEMS deformable mirror; fabrication process; focus control; optical focus; pneumatic actuation; Aluminum; Cavity resonators; Electrostatic actuators; Electrostatics; Micromechanical devices; Mirrors; Pneumatic actuators; MEMS Deformable Mirrors; SU-8; electrostatic actuation; pneumatic actuation;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318838
