Title :
Monolithic integrated MEMS mirror array module towards low electrical interference
Author :
Sakata, Tomomi ; Usui, Mituo ; Kodate, Junichi ; Jin, Yoshito
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.
Keywords :
integrated optics; interference; micro-optomechanical devices; microfabrication; micromirrors; modules; optical arrays; optical fabrication; control electrode chip; electrical interference; integrated MEMS mirror array module; monolithic integration; Arrays; Electrodes; Interference; Micromechanical devices; Mirrors; Optical switches; Silicon; electrical interference; monolithic integration;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318840