DocumentCode :
3534263
Title :
Monolithic integrated MEMS mirror array module towards low electrical interference
Author :
Sakata, Tomomi ; Usui, Mituo ; Kodate, Junichi ; Jin, Yoshito
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
fYear :
2012
fDate :
6-9 Aug. 2012
Firstpage :
136
Lastpage :
137
Abstract :
A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.
Keywords :
integrated optics; interference; micro-optomechanical devices; microfabrication; micromirrors; modules; optical arrays; optical fabrication; control electrode chip; electrical interference; integrated MEMS mirror array module; monolithic integration; Arrays; Electrodes; Interference; Micromechanical devices; Mirrors; Optical switches; Silicon; electrical interference; monolithic integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
ISSN :
2160-5033
Print_ISBN :
978-1-4577-1511-2
Type :
conf
DOI :
10.1109/OMEMS.2012.6318840
Filename :
6318840
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3534263
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