Title :
Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry
Author :
Chan, Trevor ; Megens, Mischa ; Yoo, Byung-Wook ; Chang-Hasnain, Connie ; Wu, Ming ; Horsley, David
Author_Institution :
Mech. & Aerosp. Eng., Univ. of California at Davis, Davis, CA, USA
Abstract :
We demonstrate closed-loop control of a MEMS phased array using an optical interferometer designed for in-situ phase-measurement. Phase resolution is comparable with commercial interferometers and we achieve beamsteering without calibration.
Keywords :
closed loop systems; light interferometers; micromechanical devices; micromirrors; phase control; phase measurement; 8×8 MEMS mirror array; MEMS phased array; beamsteering; calibration; closed loop phase control; in-situ interferometry; in-situ phase measurement; optical interferometer; phase resolution; Adaptive optics; Arrays; Micromechanical devices; Mirrors; Optical feedback; Optical interferometry; Phase measurement;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318845
