Title :
MEMS mirror for flexible z-axis control in a commercial confocal microscope
Author :
Lukes, Sarah J. ; Dickensheets, David L.
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT, USA
Abstract :
We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
Keywords :
membranes; micromechanical devices; micromirrors; optical focusing; optical microscopes; MEMS mirror; confocal microscope; deformable membrane mirror; flexible z-axis control; Electrodes; Gold; Lenses; Micromechanical devices; Microscopy; Mirrors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318846
