Title :
2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow
Author :
Yoo, Sunghyun ; Jin, Joo-Young ; Ha, Joon-Geun ; Ji, Chang-Hyeon ; Kim, Yong-Kweon
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
Abstract :
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.
Keywords :
elemental semiconductors; integrated optics; isolation technology; microlenses; optical fabrication; optical glass; optical scanners; silicon; 2D forward optical scanner; Si; X directions; Y directions; electrical isolation blocks; fabrication method; integrated glass microlens; pressure 1 atm; resonance; scan angles; silicon XY-stage; thermal reflow; two-dimensional forward optical scanner; Glass; Lenses; Microoptics; Optical device fabrication; Optical imaging; Silicon; 2-D forward optical scanner; glass microlens; isolation block; microlens assembly; thermal reflow;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318849
