Title :
Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan
Author :
Liu, Lin ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.
Keywords :
microlenses; micromechanical devices; micromirrors; optical scanners; scanning electron microscopy; 2D confocal image; 3D confocal image; MEMS lens scanner; axial scan; depth scan; electrothermal lens scanner; electrothermal two-axis MEMS mirror; lateral scan; three-dimensional confocal scanning microscope; voltage 3 V; wavelength 475 mum; Actuators; Lenses; Micromechanical devices; Microscopy; Mirrors; Optical microscopy; 3D confocal microscopy; MEMS lens scanner; MEMS mirror; electrothermal;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318851
