Tip-tilt-pistion micromirror based on symmetrical lateral-shift-free piezoelectric actuators

Author

Liao, Wenjun ; Zhu, Yiping ; Liu, Wenjing ; Liu, Lin ; Tang, Yongming ; Wang, Baoping ; Xie, Huikai

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2012

fDate

6-9 Aug. 2012

Firstpage

160

Lastpage

161

Abstract

This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation), respectively. At resonance, the maximum piston motion is 92 μm and the rotational scan angle is 9.6°, both measured at a 5 Vpp sinusoidal driving voltage.

Keywords

lead compounds; micro-optomechanical devices; microactuators; micromirrors; piezoelectric actuators; pistons; sol-gel processing; PZT; high fill factor tip-tilt-piston micromirror; piston motion; sinusoidal driving voltage; sol-gel process; symmetrical lateral shift-free piezoelectric actuators; Laser beams; Micromechanical devices; Micromirrors; Piezoelectric actuators; Pistons; Lead zirconate titanate (PZT); Micromirror; Piezoelectric Actuators; Tip-titl-piston;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Conference_Location

Banff, AB

ISSN

2160-5033

Print_ISBN

978-1-4577-1511-2

Type

conf

DOI

10.1109/OMEMS.2012.6318852

Filename

6318852