Title :
An electrostatically-driven MEMS tunable miniature iris diaphragm
Author :
Yu, Hongbin ; Zhou, Guangya ; Chau, Fook Siong
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.
Keywords :
cameras; electrostatic devices; micro-optomechanical devices; microlenses; optical tuning; MEMS; iris diaphragm aperture; microelectromechanical systems; miniature tunable multiblade iris diaphragm; Apertures; Blades; Clocks; Iris; Laser beams; Measurement by laser beam; Micromechanical devices; MEMS; T-shaped beam; Tunable iris diaphragm; blade; octagonal aperture;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318854
