DocumentCode
3534462
Title
An electrostatically-driven MEMS tunable miniature iris diaphragm
Author
Yu, Hongbin ; Zhou, Guangya ; Chau, Fook Siong
Author_Institution
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
164
Lastpage
165
Abstract
A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.
Keywords
cameras; electrostatic devices; micro-optomechanical devices; microlenses; optical tuning; MEMS; iris diaphragm aperture; microelectromechanical systems; miniature tunable multiblade iris diaphragm; Apertures; Blades; Clocks; Iris; Laser beams; Measurement by laser beam; Micromechanical devices; MEMS; T-shaped beam; Tunable iris diaphragm; blade; octagonal aperture;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318854
Filename
6318854
Link To Document