DocumentCode
3534488
Title
Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS
Author
Liou, C.H. ; Chiu, Yun ; Shieh, H.P.D. ; Chiou, J.C.
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
168
Lastpage
169
Abstract
A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.
Keywords
CMOS integrated circuits; micromechanical devices; near-field scanning optical microscopy; optical design techniques; optical fabrication; photodetectors; CMOS; MEMS; near-field scanning optical microscope probe; on-chip transimpedance amplifier; optical profile measurement; side pin-hole photodetector; Measurement by laser beam; Optical device fabrication; Optical fiber sensors; Optical fibers; Optical variables measurement; Photodetectors; CMOS-MEMS; near-field scanning optical microscope; photodetector; side photodetector; transimpedance amplifier;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318856
Filename
6318856
Link To Document