DocumentCode
3535243
Title
Improvement of zone control induction heating equipment for high-speed processing of semiconductor
Author
Miyagi, D. ; Saitoh, A. ; Takahashi, N. ; Uchida, N. ; Ozaki, K.
Author_Institution
Dept. of Electr. & Electron. Eng., Okayama Univ., Japan
fYear
2005
fDate
4-8 April 2005
Firstpage
1069
Lastpage
1070
Abstract
In this paper, the effect of dividing into several small coil groups having different current and frequency on heating characteristics is investigated using FEM (finite element method). The heating characteristics of graphite of each coil is examined, and a useful information for controlling current and frequency, which realize the nearly uniform heating, is obtained.
Keywords
coils; electric current control; finite element analysis; frequency control; graphite; induction heating; semiconductor device manufacture; current control; finite element method; frequency control; semiconductor high-speed processing; small coil groups; uniform heating; zone control induction heating equipment; Coils; Control systems; Eddy currents; Frequency conversion; Heat engines; Machinery; Resistance heating; Systems engineering and theory; Temperature control; Thermal pollution;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN
0-7803-9009-1
Type
conf
DOI
10.1109/INTMAG.2005.1463964
Filename
1463964
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