Title :
Improvement of zone control induction heating equipment for high-speed processing of semiconductor
Author :
Miyagi, D. ; Saitoh, A. ; Takahashi, N. ; Uchida, N. ; Ozaki, K.
Author_Institution :
Dept. of Electr. & Electron. Eng., Okayama Univ., Japan
Abstract :
In this paper, the effect of dividing into several small coil groups having different current and frequency on heating characteristics is investigated using FEM (finite element method). The heating characteristics of graphite of each coil is examined, and a useful information for controlling current and frequency, which realize the nearly uniform heating, is obtained.
Keywords :
coils; electric current control; finite element analysis; frequency control; graphite; induction heating; semiconductor device manufacture; current control; finite element method; frequency control; semiconductor high-speed processing; small coil groups; uniform heating; zone control induction heating equipment; Coils; Control systems; Eddy currents; Frequency conversion; Heat engines; Machinery; Resistance heating; Systems engineering and theory; Temperature control; Thermal pollution;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463964
