DocumentCode
3535271
Title
Effect of UV light on the bending properties of a piezoresistive microcantilever
Author
Prabakar, K. ; Jayapandian, J. ; Lakshmoji, K. ; Mythili, R.
Author_Institution
Mater. Sci. Group, Indira Gandhi Centre for Atomic Res., Kalpakkam, India
fYear
2011
fDate
28-30 Nov. 2011
Firstpage
518
Lastpage
519
Abstract
In the present work, bending properties of a commercial piezo resistive cantilever when exposed to Ultra Violet (UV) output which is proportional to the bending of the cantilever has two distinctive features viz., a near instantaneous response light is studied. When exposed to UV light of wavelength 365nm, the bridge immediately after switching on the UV, and a slow response followed by it. These are explained on the basis of photo induced stress and thermal process.
Keywords
bending; cantilevers; micromechanical devices; piezoresistive devices; ultraviolet radiation effects; UV light effect; bending properties; instantaneous response light; photoinduced stress; piezoresistive microcantilever; thermal process; ultraviolet light; wavelength 365 nm; Photonics; Resonant frequency; Silicon; Switches; UV light; fast and slowbending response; piezo resistive cantilever;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoscience, Engineering and Technology (ICONSET), 2011 International Conference on
Conference_Location
Chennai
Print_ISBN
978-1-4673-0071-1
Type
conf
DOI
10.1109/ICONSET.2011.6168020
Filename
6168020
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