Title :
Effect of UV light on the bending properties of a piezoresistive microcantilever
Author :
Prabakar, K. ; Jayapandian, J. ; Lakshmoji, K. ; Mythili, R.
Author_Institution :
Mater. Sci. Group, Indira Gandhi Centre for Atomic Res., Kalpakkam, India
Abstract :
In the present work, bending properties of a commercial piezo resistive cantilever when exposed to Ultra Violet (UV) output which is proportional to the bending of the cantilever has two distinctive features viz., a near instantaneous response light is studied. When exposed to UV light of wavelength 365nm, the bridge immediately after switching on the UV, and a slow response followed by it. These are explained on the basis of photo induced stress and thermal process.
Keywords :
bending; cantilevers; micromechanical devices; piezoresistive devices; ultraviolet radiation effects; UV light effect; bending properties; instantaneous response light; photoinduced stress; piezoresistive microcantilever; thermal process; ultraviolet light; wavelength 365 nm; Photonics; Resonant frequency; Silicon; Switches; UV light; fast and slowbending response; piezo resistive cantilever;
Conference_Titel :
Nanoscience, Engineering and Technology (ICONSET), 2011 International Conference on
Conference_Location :
Chennai
Print_ISBN :
978-1-4673-0071-1
DOI :
10.1109/ICONSET.2011.6168020
