RF integrated inductors with various slit patterns using CoFeBN soft magnetic film

Ferromagnetic RF integrated inductors has drawn attention of microwave engineers because of future possibility of further miniaturization and high-Q in monolithic microwave integrated circuit (MMIC). This paper attacks this complex problem by the combination of using CoFeBN high saturation moment thin film with fairly high FMR frequency and the artificial slit patterning to further increase of the FMR frequency and also to reduce the eddy currents. Both parallel slit pattern and orthogonal slit pattern are investigated.