Fluidic shear-stress measurement using surface-micromachined sensors

Author

Huang, Jin-Biao ; Liu, Chang ; Jiang, Fukang ; Tung, Steve ; Tai, Yu-Chong ; Ho, Chih-Ming

Author_Institution

Center for Micro Syst., California Univ., Los Angeles, CA, USA

fYear

1995

fDate

6-10 Nov 1995

Firstpage

16

Lastpage

19

Abstract

A poly-silicon hot-film shear-stress sensor insulated by a vacuum-chamber underneath has been designed and fabricated by the surface micromachining technology. The sensor is operated at both constant current and constant temperature modes. The dynamic performance (including time constant and cut-off frequency) measurement, calibration, and temperature compensation of the sensor have been realized

Keywords

calibration; compensation; elemental semiconductors; flow measurement; microsensors; silicon; stress measurement; Si; calibration; constant current mode; constant temperature mode; cut-off frequency; dynamic performance; fluidic shear-stress measurement; polysilicon hot-film shear-stress sensor; surface-micromachined sensors; temperature compensation; time constant; Calibration; Cutoff frequency; Fluid dynamics; Frequency measurement; Insulation; Micromachining; Temperature measurement; Temperature sensors; Time measurement; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Print_ISBN

0-7803-2624-5

Type

conf

DOI

10.1109/TENCON.1995.496324

Filename

496324