Title :
Fluidic shear-stress measurement using surface-micromachined sensors
Author :
Huang, Jin-Biao ; Liu, Chang ; Jiang, Fukang ; Tung, Steve ; Tai, Yu-Chong ; Ho, Chih-Ming
Author_Institution :
Center for Micro Syst., California Univ., Los Angeles, CA, USA
Abstract :
A poly-silicon hot-film shear-stress sensor insulated by a vacuum-chamber underneath has been designed and fabricated by the surface micromachining technology. The sensor is operated at both constant current and constant temperature modes. The dynamic performance (including time constant and cut-off frequency) measurement, calibration, and temperature compensation of the sensor have been realized
Keywords :
calibration; compensation; elemental semiconductors; flow measurement; microsensors; silicon; stress measurement; Si; calibration; constant current mode; constant temperature mode; cut-off frequency; dynamic performance; fluidic shear-stress measurement; polysilicon hot-film shear-stress sensor; surface-micromachined sensors; temperature compensation; time constant; Calibration; Cutoff frequency; Fluid dynamics; Frequency measurement; Insulation; Micromachining; Temperature measurement; Temperature sensors; Time measurement; Vacuum technology;
Conference_Titel :
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN :
0-7803-2624-5
DOI :
10.1109/TENCON.1995.496324
