• DocumentCode
    3535944
  • Title

    Formation and suppression of a newly discovered secondary EOS event in HBM test systems

  • Author

    Meuse, Tom ; Ting, Larry ; Schichl, Joe ; Barrett, Robert ; Bennett, David ; Cline, Roger ; Duvvury, Charvaka ; Hopkins, Michael ; Kunz, Hans ; Leiserson, John ; Steinhoff, Robert

  • Author_Institution
    Thermo Electron Corp., Lowell, MA, USA
  • fYear
    2004
  • fDate
    19-23 Sept. 2004
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    A previously undetected trailing pulse from HBM testers was found to create unexpected gate oxide failures on new technologies. This secondary pulse, which is EOS in nature, is caused by the discharge relay and the parasitics of the charge circuit. This paper investigates this critical phenomenon and establishes the tester improvements to safely suppress the trailing pulse effects.
  • Keywords
    electrostatic discharge; HBM test systems; formation; gate oxide failures; secondary EOS event; suppression; trailing pulse effects; Biological system modeling; Circuit testing; Degradation; Earth Observing System; Pulse circuits; Relays; Semiconductor device testing; Stress; System testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium, 2004. EOS/ESD '04.
  • Conference_Location
    Grapevine, TX
  • Print_ISBN
    978-1-5853-7063-4
  • Electronic_ISBN
    978-1-5853-7063-4
  • Type

    conf

  • DOI
    10.1109/EOSESD.2004.5272618
  • Filename
    5272618
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3535944