Title :
Luminescent porous polycrystalline silicon film
Author :
Han, P.G. ; Poon, M.C. ; Ko, P.K. ; Sin, J.K.O. ; Wong, M. ; Wong, H.
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clearwater Bay, Hong Kong
Abstract :
This paper will present new growth mechanisms, nanostructures and photoluminescence results on porous polycrystalline silicon films. The possible explanations and models will also be proposed and discussed
Keywords :
elemental semiconductors; nanostructured materials; photoluminescence; porous materials; semiconductor growth; semiconductor thin films; silicon; Si; growth; nanostructure; photoluminescence; porous polycrystalline silicon films; Grain size; Semiconductor films; Silicon;
Conference_Titel :
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN :
0-7803-2624-5
DOI :
10.1109/TENCON.1995.496337
