DocumentCode
3535951
Title
Luminescent porous polycrystalline silicon film
Author
Han, P.G. ; Poon, M.C. ; Ko, P.K. ; Sin, J.K.O. ; Wong, M. ; Wong, H.
Author_Institution
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clearwater Bay, Hong Kong
fYear
1995
fDate
6-10 Nov 1995
Firstpage
67
Lastpage
70
Abstract
This paper will present new growth mechanisms, nanostructures and photoluminescence results on porous polycrystalline silicon films. The possible explanations and models will also be proposed and discussed
Keywords
elemental semiconductors; nanostructured materials; photoluminescence; porous materials; semiconductor growth; semiconductor thin films; silicon; Si; growth; nanostructure; photoluminescence; porous polycrystalline silicon films; Grain size; Semiconductor films; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN
0-7803-2624-5
Type
conf
DOI
10.1109/TENCON.1995.496337
Filename
496337
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