• DocumentCode
    3535951
  • Title

    Luminescent porous polycrystalline silicon film

  • Author

    Han, P.G. ; Poon, M.C. ; Ko, P.K. ; Sin, J.K.O. ; Wong, M. ; Wong, H.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clearwater Bay, Hong Kong
  • fYear
    1995
  • fDate
    6-10 Nov 1995
  • Firstpage
    67
  • Lastpage
    70
  • Abstract
    This paper will present new growth mechanisms, nanostructures and photoluminescence results on porous polycrystalline silicon films. The possible explanations and models will also be proposed and discussed
  • Keywords
    elemental semiconductors; nanostructured materials; photoluminescence; porous materials; semiconductor growth; semiconductor thin films; silicon; Si; growth; nanostructure; photoluminescence; porous polycrystalline silicon films; Grain size; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
  • Print_ISBN
    0-7803-2624-5
  • Type

    conf

  • DOI
    10.1109/TENCON.1995.496337
  • Filename
    496337