Title :
Optimized CMOS infrared detector microsystems
Author :
Schneeberger, N. ; Déteindre, S. ; Paul, O. ; Baltes, H.
Author_Institution :
Lab. of Phys. Electron., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
We fabricated and characterized four different CMOS thermoelectric infrared radiation sensor microsystems. The performance of these systems was modelled with the finite element simulation package SOLIDIS, based on measured materials properties. The agreement with experiment was better than 7.5%. Based on this validation we optimized the design parameters of such microsystems
Keywords :
CMOS integrated circuits; circuit optimisation; finite element analysis; infrared detectors; integrated circuit modelling; micromachining; microsensors; thermoelectric devices; CMOS thermoelectric infrared radiation sensor microsystems; SOLIDIS; design parameter optimization; double poly double metal CMOS process; finite element simulation package; micromachined thermoelectric sensor; performance modelling; Finite element methods; Infrared detectors; Infrared sensors; Material properties; Packaging; Semiconductor device modeling; Sensor phenomena and characterization; Solid modeling; Thermal sensors; Thermoelectricity;
Conference_Titel :
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN :
0-7803-2624-5
DOI :
10.1109/TENCON.1995.496372
