Multiple beam electron guns with gated electrode and carbon nanotube cathode

In this paper we present the method to produce the multiple beam field-emission structure with cylindrical projections made from glassy carbon and coated with thin film of carbon nanotubes. The design of the 7-beam cathode-gate unit consisting of a flat field emission cathode with metal film gate on insulating substrate and 19-beam field emission electron gun with beam compression is performed. It is shown experimentally on a model 7-beam gun that achieved the level of current density of 2,8 A/cm², for 19-beam gun - 12 A/cm² on cathode.