Noble development of Al/NiP substrate with soft magnetic underlayer formation of nano-crystalline and (111) orientation of plated NiFe film

On the purpose of reducing fabrication process, the development of the noble substrate with soft underlayer by means of controlling the microstructure and crystal orientation of a plated soft magnetic layer was carried out. A 2.5-inch Al/NiP disk was prepared as a rigid body of a substrate, and electroless-plated NiFe was used as the soft magnetic material. The structure was examined by cross-sectional transmission electron microscopy, and the magnetic properties were evaluated by vibrating sample magnetometer and longitudinal Kerr equipment. Resulting facts indicate that fabrication of moderate crystal-oriented seed layer can control grain size and crystal orientation of plated NiFe grains by epitaxial growth.