DocumentCode
3536892
Title
The slowing systems fabrication based on alumina and polymeric media
Author
Podvigalkin, V.Y.
Author_Institution
Saratov Branch, Kotel´nirov Inst. of Radioeng. & Electron., Saratov, Russia
fYear
2012
fDate
19-20 Sept. 2012
Firstpage
233
Lastpage
237
Abstract
The construction of the slowing structures with using the polymeric current - carrying structures in integrated circuits is described. The configuration of the section relief of integrated circuits is based on the method of vertically through micro profiles. The vertically through micro profiles makes the vertically through micro cavities. Such architecture of integrated of electromagnetic fields in micro cavities without touching the dielectric carrier.
Keywords
alumina; electromagnetic fields; microcavities; microwave integrated circuits; polymers; slow wave structures; alumina; electromagnetic fields; integrated circuits; polymeric current-carrying structures; polymeric media; slow wave structure; slowing system fabrication; vertically through microcavity; vertically through microprofiles;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4673-2096-2
Type
conf
DOI
10.1109/APEDE.2012.6478051
Filename
6478051
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