DocumentCode
3536981
Title
Mathematical calculation microwave plasma reactor for nanoelectronics
Author
Bochkarev, A.O. ; Sivyakov, B.K.
Author_Institution
Saratov State Tech. Univ., Saratov, Russia
fYear
2012
fDate
19-20 Sept. 2012
Firstpage
273
Lastpage
277
Abstract
The paper calculates the size and position of holes due to herpes feeding waveguide with a variable height of narrow wall and a cylindrical chamber with a view to more homogeneous plasma in a cylindrical chamber.
Keywords
circular waveguides; mathematical analysis; microwave devices; nanoelectronics; plasma devices; plasma filled waveguides; cylindrical chamber; herpes feeding waveguide; hole position calculation; hole size calculation; homogeneous plasma; mathematical calculation; microwave plasma reactor; nanoelectronics; narrow wall height; Nanoelectronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4673-2096-2
Type
conf
DOI
10.1109/APEDE.2012.6478060
Filename
6478060
Link To Document