Title :
Mathematical calculation microwave plasma reactor for nanoelectronics
Author :
Bochkarev, A.O. ; Sivyakov, B.K.
Author_Institution :
Saratov State Tech. Univ., Saratov, Russia
Abstract :
The paper calculates the size and position of holes due to herpes feeding waveguide with a variable height of narrow wall and a cylindrical chamber with a view to more homogeneous plasma in a cylindrical chamber.
Keywords :
circular waveguides; mathematical analysis; microwave devices; nanoelectronics; plasma devices; plasma filled waveguides; cylindrical chamber; herpes feeding waveguide; hole position calculation; hole size calculation; homogeneous plasma; mathematical calculation; microwave plasma reactor; nanoelectronics; narrow wall height; Nanoelectronics;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4673-2096-2
DOI :
10.1109/APEDE.2012.6478060
