DocumentCode
3537087
Title
An EPROM cell with a magnesium electronic injector
Author
Kong, Sik On ; Kwok, Chee Yee ; Wong, Sai Peng
Author_Institution
Dept. of Electr. & Electron. Eng., Auckland Univ., New Zealand
fYear
1995
fDate
6-10 Nov 1995
Firstpage
456
Lastpage
459
Abstract
By using Mg as the tunnelling electrode for an EPROM cell, it is shown in a control experiment that the tunnelling current is much enhanced while the tunnelling field is much reduced after a sintering procedure in which Mg reacts with the SiO2 dielectric. Potentially, this may lead to faster programming, lower programming voltages and better programming endurance. An experimental EPROM cell has been made and has demonstrated programmability
Keywords
EPROM; MOS memory circuits; magnesium; sintering; tunnelling; EPROM cell; Mg-SiO2; SiO2 dielectric; magnesium electronic injector; programmability; sintering; tunnelling electrode; Cathodes; Crystalline materials; Current density; EPROM; Electrodes; Electrons; Magnesium; Silicon; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN
0-7803-2624-5
Type
conf
DOI
10.1109/TENCON.1995.496438
Filename
496438
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