Title :
Dependence of surface resistivity on the thickness of vanadium films
Author :
Maslov, D.M. ; Oleynik, A.S.
Author_Institution :
Saratov State Tech. Univ., Saratov, Russia
Abstract :
Was studied dependence of the resistivity of the film of vanadium on its thickness. The aim was to film spraying of vanadium thickness of several tens of nanometers. Control of the thickness of deposited films of vanadium was carried out using the resistive method.
Keywords :
metallic thin films; spray coating techniques; surface resistance; vanadium; V; deposited films; resistive method; spraying; surface resistivity; vanadium film thickness;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4673-2096-2
DOI :
10.1109/APEDE.2012.6478074
