DocumentCode :
3537227
Title :
Silicon precipitation in surface layers of amorphous SI3N4 films with ArF excimer laser
Author :
Nakamae, Koji ; Kurosawa, K. ; Sasaki, Wataru ; Takigrawa, Y. ; Kato, Yu ; Okuda, Masumi
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
297
Keywords :
Amorphous materials; Gas lasers; Laser ablation; Laser theory; Neodymium; Optical pulses; Pump lasers; Semiconductor films; Silicon; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527291
Filename :
527291
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3537227
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