• DocumentCode
    3537374
  • Title

    Investigating the effect of biologically active environments and water on various modifications of silicon

  • Author

    Bilenko, D.I. ; Belobrovaya, O.Ya. ; Galushka, V.V. ; Melnikova, T.E. ; Polyanskaya, V.P. ; Mysenko, I.B. ; Terin, D.V.

  • Author_Institution
    Saratov State Univ. in the name of N.G. Chernyshevskiy, Saratov, Russia
  • fYear
    2012
  • fDate
    19-20 Sept. 2012
  • Firstpage
    438
  • Lastpage
    439
  • Abstract
    The effect of biologically active environments and water on various modifications of silicon are investigated.
  • Keywords
    elemental semiconductors; silicon; surface treatment; Si; biologically active environments; silicon; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    978-1-4673-2096-2
  • Type

    conf

  • DOI
    10.1109/APEDE.2012.6478099
  • Filename
    6478099