DocumentCode
3537374
Title
Investigating the effect of biologically active environments and water on various modifications of silicon
Author
Bilenko, D.I. ; Belobrovaya, O.Ya. ; Galushka, V.V. ; Melnikova, T.E. ; Polyanskaya, V.P. ; Mysenko, I.B. ; Terin, D.V.
Author_Institution
Saratov State Univ. in the name of N.G. Chernyshevskiy, Saratov, Russia
fYear
2012
fDate
19-20 Sept. 2012
Firstpage
438
Lastpage
439
Abstract
The effect of biologically active environments and water on various modifications of silicon are investigated.
Keywords
elemental semiconductors; silicon; surface treatment; Si; biologically active environments; silicon; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4673-2096-2
Type
conf
DOI
10.1109/APEDE.2012.6478099
Filename
6478099
Link To Document