Title :
Investigating the effect of biologically active environments and water on various modifications of silicon
Author :
Bilenko, D.I. ; Belobrovaya, O.Ya. ; Galushka, V.V. ; Melnikova, T.E. ; Polyanskaya, V.P. ; Mysenko, I.B. ; Terin, D.V.
Author_Institution :
Saratov State Univ. in the name of N.G. Chernyshevskiy, Saratov, Russia
Abstract :
The effect of biologically active environments and water on various modifications of silicon are investigated.
Keywords :
elemental semiconductors; silicon; surface treatment; Si; biologically active environments; silicon; Silicon;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4673-2096-2
DOI :
10.1109/APEDE.2012.6478099
