Title :
Effect of electrode metals on electrical conduction in polyimide thin films prepared by vapor deposition polymerization
Author :
Yoda, Shozo ; Shimizu, Shu ; Miyairi, Keiichi
Author_Institution :
Fac. of Eng., Shinshu Univ., Nagano, Japan
Abstract :
The characteristics of electrical conduction in polyimide vapor deposition polymerization films have been investigated. In the case of samples with Au electrodes, two conduction types are observed depending on the bias voltage. Samples with Al electrodes show anomalous currents. These results suggest that ionic space charges accumulated near the electrodes influence the electrical conduction
Keywords :
electrical conductivity; polymer films; polymerisation; vapour deposited coatings; electrical conduction; electrode metals; ionic space charge; polyimide thin films; vapor deposition polymerization; Chemical vapor deposition; Electrodes; Gold; Metal-insulator structures; Polyimides; Polymer films; Sputtering; Substrates; Temperature; Transistors;
Conference_Titel :
Electrical Insulating Materials, 1995. International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
4-88686-047-8
DOI :
10.1109/ISEIM.1995.496516
