DIrect observation of a current-confined-path nano-oxide layer structure by three-dimensional atom probe

Author

Fukuzawa, H. ; Iwasaki, Hisao ; Tanaka, Y. ; Ulfig, R.M. ; Larson, D.J.

Author_Institution

Corp. R & D Center, Toshiba Corp., Kawasaki, Japan

fYear

2005

fDate

4-8 April 2005

Firstpage

1699

Lastpage

1700

Abstract

Successful observation of current-confined-path (CCP) structures in the current-perpendicular-to-plane (CPP) film by the local electrode atom probe (LEAP) is reported. The CCP-CPP spin-valve film is composed of substrate/Ta/Ru/PtMn/CoFe/Ru/CoFe/CCP-nanooxide layer(NOL) spacer/CoFe/NiFe, where CCP-NOL spacer layer of AlCu-NOL is formed by ion-assisted oxidation. LEAP images show that field evaporation successfully progressed from the top protective cap to the bottom underlayer. In addition, the LEAP data clearly detects the CCP structure made by Cu in the Al₂O₃ matrix. The direct three-dimensional observation of the Cu-alumina CCP nano-structure by LEAP enables the derivation of the density of the metallic channels and the composition profile of the specific elements inside these metallic channels.

Keywords

aluminium compounds; cobalt alloys; copper; ferromagnetic materials; field evaporation; iron alloys; magnetic multilayers; manganese alloys; nanostructured materials; nickel alloys; oxidation; platinum alloys; ruthenium; spin valves; tantalum; Ta-Ru-PtMn-CoFe-Cu-Al₂O₃-NiFe; composition profile; current-confined-path nanooxide layer structure; current-perpendicular-to-plane film; field evaporation; ion-assisted oxidation; local electrode atom probe; metallic channel density; protective cap; spin-valve film; three-dimensional atom probe; underlayer; Data visualization; Giant magnetoresistance; Instruments; Magnetic recording; Magnetic tunneling; Nanostructures; Oxidation; Probes; Protection; Scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1464283

Filename

1464283