Title :
Interaction of the working surface of field emission cathodes from carbon fibre with ions of residual gases
Author :
Sheshin, Eugeny P. ; Suvorov, Alexander L.
Author_Institution :
Inst. of Theor. & Exp. Phys., Moscow, Russia
Abstract :
Some experiments of the last years showed that the use of carbon fibre as initial material for field emission cathodes is possible for production of a number of vacuum microelectronics devices. The report presents the results of detailed study (with the help of scanning electron, field electron and field ion microscopy) of the dynamics of carbon fibre cathode microrelief change in relation to the emission properties. The authors found most optimal working modes of particular types of field electron cathodes, estimated their life-time and possible deviations of main parameters in the process of utilization
Keywords :
carbon fibres; cathodes; electron field emission; field emission electron microscopy; scanning electron microscopy; vacuum microelectronics; C; carbon fibre; emission properties; field electron microscopy; field emission cathodes; field ion microscopy; lifetime estimation; optimal working modes; residual gas ions; scanning electron microscopy; vacuum microelectronics devices; working surface; Carbon dioxide; Cathodes; Electron emission; Gases; Light sources; Microelectronics; Organic materials; Physics; Production; Vacuum technology;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.603697