Title :
Preparation of Sm-Fe giant magnetostrictive thin films by dc magnetron sputtering
Author :
Matsumura, Y. ; Kadowaki, A. ; Masuda, S. ; Takahashi, K. ; Tsukayama, Y. ; Nishi, Y.
Author_Institution :
Dept. of Appl. Sci., Tokai Univ., Kanagawa, Japan
Abstract :
The composition dependence, argon sputtering gas pressure and substrate temperature for magnetostrictive properties of Sm-Fe thin films were investigated. The giant magnetostrictive thin films were prepared by dc magnetron sputtering. Sample microstructure, film composition and in-plane magnetostriction were obtained by X-ray diffraction, energy dispersive X-ray spectroscopy and optical cantilever method.
Keywords :
X-ray chemical analysis; X-ray diffraction; crystal microstructure; ferromagnetic materials; iron alloys; magnetic thin films; magnetostriction; samarium alloys; sputter deposition; SmFe; X-ray diffraction; argon sputtering gas pressure; composition dependence; dc magnetron sputtering; energy dispersive X-ray spectroscopy; film composition; giant magnetostrictive thin films; in-plane magnetostriction; magnetostrictive properties; microstructure; optical cantilever method; substrate temperature; Argon; Magnetic properties; Magnetostriction; Microstructure; Optical diffraction; Optical films; Sputtering; Substrates; Temperature dependence; X-ray diffraction;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1464329
