Fabrication of voltage-driven magneto-optical spatial light modulator

Author

Takagi, H. ; Park, I.H. ; Mizoguchi, M. ; Nishimura, K. ; Uchida, H. ; Inoue, M.

Author_Institution

Toyota Nat. Coll. of Technol., Japan

fYear

2005

fDate

4-8 April 2005

Firstpage

2085

Lastpage

2086

Abstract

Aerosol deposition method (ADM) was adopted to fabricate the piezoelectric PZT film without the high temperature annealing process to reduce the damage of the Bi:YlG layer. The voltage-driven magneto-optic spatial light modulator (MOSLM) was fabricated on flat-surface Bi:YIG film including pixel structure by site-selected epitaxial method. Finite element method was used to investigated efficiency of the structure. PZT film was used to stress the magneto-optical Bi:YIG film to switch the magnetization direction of the film.

Keywords

aerosols; annealing; bismuth; epitaxial growth; finite element analysis; magnetic switching; magnetisation; magneto-optical modulation; optical fabrication; piezoelectric thin films; spatial light modulators; yttrium compounds; PZT; PbZrO3TiO3; YFe5O12:Bi; YIG:Bi; aerosol deposition method; annealing; finite element method; magnetization direction switching; magneto-optical film; piezoelectric PZT film; pixel structure; site-selected epitaxial method; voltage-driven magneto-optical spatial light modulator; Aerosols; Annealing; Fabrication; Finite element methods; Magnetic modulators; Optical modulation; Piezoelectric films; Switches; Temperature; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1464481

Filename

1464481