In situ ellipsometric monitoring of growth of zinc oxide thin films with applications to high-frequency fiber acousto-optic components

Author

Zayer, N.K. ; Grellier, A.J.C. ; Pannell, C.N. ; Greef ; Rogers, Keith ; Zervas, Michalis N.

Author_Institution

Sch. of Phys. Sci., Kent Univ., Canterbury, UK

fYear

1998

fDate

3-8 May 1998

Firstpage

251

Lastpage

252

Abstract

Summary form only given. Thin-film acoustic transducers of zinc oxide (ZnO) are currently being investigated by several research groups for application to in fiber or at least fiber-compatible acoustooptic devices operating in the GHz frequency range. RF or DC sputtering is the method of choice for growing these films, although other methods such as pulsed laser deposition (PLD) have also been used.

Keywords

acousto-optical devices; ellipsometry; monitoring; optical communication equipment; optical films; pulsed laser deposition; sputter deposition; zinc compounds; DC sputtering; GHz frequency range; RF sputtering; ZnO; fiber-compatible acoustooptic devices; high-frequency fiber acousto-optic components; in situ ellipsometric monitoring; pulsed laser deposition; thin-film acoustic transducers; zinc oxide thin film growth; Acoustic transducers; Acoustooptic devices; Frequency; Monitoring; Optical fiber devices; Pulsed laser deposition; Sputtering; Thin film devices; Transistors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

1-55752-339-0

Type

conf

DOI

10.1109/CLEO.1998.676127

Filename

676127