DocumentCode
3541370
Title
Characteristic modulation of silicon MOSFETs and single electron transistors with a movable gate electrode
Author
Park, J.S. ; Saraya, T. ; Miyaji, K. ; Shimizu, K. ; Higo, A. ; Takahashi, K. ; Yi, Y.H. ; Toshiyoshi, H. ; Hiramoto, Toshiro
Author_Institution
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
fYear
2008
fDate
15-16 June 2008
Firstpage
1
Lastpage
2
Abstract
The silicon MOSFET and single-electron-transistor (SET) with a movable gate electrode (MGE) are reported. For the first time, the modulation of the pull-in voltage, where subthreshold swing (SS) is much steeper. than 60mV/dec, is experimentally demonstrated in MGE MOSFET using an additional electrode. The modulation of FWHM and peak position of Coulomb blockade oscillation (CBO) by tuning capacitance of SET is also experimentally demonstrated for the first time.
Keywords
Coulomb blockade; MOSFET; silicon; single electron transistors; Coulomb blockade oscillation; movable gate electrode; silicon MOSFET; single electron transistors; subthreshold swing; tuning capacitance; Capacitance; Circuit optimization; Electrodes; Equivalent circuits; Fabrication; MOSFETs; Silicon; Single electron transistors; Tuning; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Nanoelectronics Workshop, 2008. SNW 2008. IEEE
Conference_Location
Honolulu, HI
Print_ISBN
978-1-4244-2071-1
Type
conf
DOI
10.1109/SNW.2008.5418442
Filename
5418442
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