DocumentCode
3541739
Title
Compact modeling of surrounding-gate MOSFETs with doped channel in subthreshold region
Author
Choi, Byung-Kil ; Jeong, Min-Kyu ; Kwon, Hyuck-In ; Lee, Jong-Ho
Author_Institution
Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Daegu, South Korea
fYear
2008
fDate
15-16 June 2008
Firstpage
1
Lastpage
2
Abstract
The modeling of the surface potential and diffusion current of SG MOSFETs with doped channel in the subthreshold region was preformed in this study. The compact models were verified in terms of channel length, fin body width, and body doping concentration at a given VGS and VDS by comparing with the results of the 3-D device simulation, and shown a good agreement with 3-D simulation.
Keywords
MOSFET; Poisson equation; diffusion; doping profiles; semiconductor device models; semiconductor doping; surface potential; 3D device simulation; body doping concentration; channel length; compact modeling; diffusion current; doped channel; fin body width; subthreshold region; surface potential; surrounding-gate MOSFET; Controllability; Doping; Integrated circuit modeling; MOSFETs; Nanoscale devices; Poisson equations; Semiconductor device modeling; Semiconductor process modeling; Subthreshold current; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Nanoelectronics Workshop, 2008. SNW 2008. IEEE
Conference_Location
Honolulu, HI
Print_ISBN
978-1-4244-2071-1
Type
conf
DOI
10.1109/SNW.2008.5418492
Filename
5418492
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