Hexagonal shaped microcantilever based IR imaging sensor

Author

Gaber, Hesham H. ; El-Semary, Hamed ; Ali, Hazem H.

Author_Institution

Electron. & Commun. Eng. Coll., Arab Acad. for Sci. & Technol., Cairo, Egypt

fYear

2009

fDate

19-22 Dec. 2009

Firstpage

370

Lastpage

373

Abstract

This paper is an analytical study for a new design microcantilever based IR (Infra Red) sensor. Using hexagonal structure increases energy absorbed, and is useful for the imaging processing after that due to using hexagonal coordinates. Fill factor is also one of the most properties improved in this design. Bimaterial microcantilever is used as a mechanical sensor which is deflected based on the mismatch between the two thermal expansions for the materials used. Maximizing deflection is analyzed and computed NETD_TF (Noise Equivalent Temperature Difference) calculated as low as 2.5 mK which proof the good performance of the proposed sensor.

Keywords

cantilevers; image sensors; infrared detectors; micromechanical devices; IR imaging sensor; NETDTF; bimaterial microcantilever; design microcantilever; hexagonal structure; infrared sensor; mechanical sensor; mismatch; noise equivalent temperature difference; thermal expansions; Image sensors; Infrared image sensors; Leg; Mechanical sensors; Micromechanical devices; Optical imaging; Optoelectronic and photonic sensors; Sensor arrays; Sensor systems; Temperature sensors; Hexagonal Sensor; IR imaging sensor; MEMS; microcantilever;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics (ICM), 2009 International Conference on

Conference_Location

Marrakech

Print_ISBN

978-1-4244-5814-1

Type

conf

DOI

10.1109/ICM.2009.5418605

Filename

5418605