DocumentCode
354354
Title
Interlayer MEMS RF switch for 3D MMICS
Author
Wang, Y.A. ; Qinghua Kang ; Bosui Liu ; Ferendeci, A.M. ; Mah, M.
Author_Institution
Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA
Volume
2
fYear
2000
fDate
11-16 June 2000
Firstpage
1245
Abstract
A novel interlayer micromachined capacitive microwave switch sandwiched between two polyimide layers and two ground planes was designed and fabricated. The switch structure and the coplanar waveguide in the switch region were optimized for low insertion loss in the "on" state and high return loss and high isolation in the "off" state while satisfying other restraint conditions. Four serpentine beams were connected to the switch capacitance plate to reduce the actuation voltage.
Keywords
MMIC; coplanar waveguide components; losses; microactuators; microwave switches; 3D MMICS; actuation voltage; capacitive microwave switch; coplanar waveguide; ground planes; insertion loss; interlayer MEMS RF switch; isolation; polyimide layers; restraint conditions; return loss; serpentine beams; switch capacitance plate; Coplanar waveguides; Gold; Impedance; MMICs; Micromechanical devices; Polyimides; Radio frequency; Silicon; Strips; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location
Boston, MA, USA
ISSN
0149-645X
Print_ISBN
0-7803-5687-X
Type
conf
DOI
10.1109/MWSYM.2000.863585
Filename
863585
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