A CMOS-MEMS-based label-free protein sensor for high-sensitive and compact system

We have developed a CMOS-MEMS-based label-free protein sensor, which utilizes nonlinear optical transmittance change by the Fabry-Perot interference to enhance the sensitivity of surface-stress. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1 μN/m which is two orders of magnitude above the peizoresistive type. A read-out tiny photocurrent from the multidimensional arrayed MEMS sensor is signal-processed by integrated source follower circuit, selector, and decoder. The integrated MEMS sensor array can be used for screening analysis for any cancers.