DocumentCode
3544473
Title
How lasers and optics help increase semiconductor manufacturing yield
Author
Stokowski, S. ; Vaez-Iravani, M.
Author_Institution
KLA-Tencor, Milpitas, CA, USA
fYear
1998
fDate
3-8 May 1998
Firstpage
349
Abstract
Summary form only given. We discuss the requirements of, and solutions for, the inspection problems for the ULSI technology. Preferred embodiments for specific detection problems are described, and the possible limitations, and extensions, of the relevant technologies are discussed.
Keywords
ULSI; inspection; integrated circuit testing; measurement by laser beam; IC testing technologies; ULSI technology; detection problems; inspection problems; lasers; optics; semiconductor manufacturing yield; High speed optical techniques; Inspection; Optical films; Optical filters; Optical scattering; Optical sensors; Semiconductor device manufacture; Semiconductor lasers; Throughput; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
1-55752-339-0
Type
conf
DOI
10.1109/CLEO.1998.676280
Filename
676280
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