Design a piezoelectric actuator for micro-vibration isolation plat and research on the affection of dynamic capacitance property

For the micro-vibration isolation plate´s purpose of vibrating isolation, designed a kind of third generation piezoelectric actuator, and modified the ejector rod to make sure the output displacement effective. The dynamic and static experiments on the designed piezoelectric actuator showed that the actuator had good stability and the actuating force gain did not change sharply with frequency and almost could keep at the same level. But, we also found that the curves that the actuating force augments changing with voltage was not linearity, and had irregularity fluctuation, through analyzed the theory of piezoelectric and published papers, an experiment about the character of piezoelectric actuator between current and frequent was finished. The result shows that: Because the initial condition and boundary condition was fixed. The gain of output-force has relationship with dynamic condenser, which isn´t increase with the voltage and current linear. But the curve has a frequency corner, and the curves shows descending fluctuation after the certain frequent point; The frequent point value will descent when the actuating voltage increased, which is caused by the mechanism of actuator, the existent of pre-pressure, the complex couple of piezoelectric actuator, the characters of material et al. Through the research on designed actuator and dynamic condenser, the characters of actuator are hold and the accurate nonlinear principle caused by dynamic condenser is discovered.