DocumentCode
3546166
Title
A fully integrated optofluidic micro-iris
Author
Müller, P. ; Feuerstein, R. ; Zappe, H.
Author_Institution
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
7
Lastpage
10
Abstract
We report on a novel type of tunable optofluidic micro-iris composed of a microfluidic chamber filled with two immiscible liquid phases, a highly absorbing aqueous pigment dispersion and a mixture of transparent silicone oils. The pigment dispersion, which is forced to assume a ring shape using a combination of changes in surface wettability and topography, defines a circular optical aperture of high contrast. Using integrated electrowetting actuation, the aperture diameter can be tuned in four discrete steps. The advantages of the concept are the absence of any moving parts, compactness of design, low power consumption (<; 5 mW), moderate drive voltage (75 V), high uniform transmission (>; 86 %) and highly reliable and repeatable tunability.
Keywords
integrated optoelectronics; micro-optomechanical devices; microactuators; microfluidics; oils; optical design techniques; optical fabrication; silicones; wetting; aqueous pigment dispersion; circular optical aperture; fully integrated optofluidic micro-iris; immiscible liquid phase; integrated electrowetting actuation; microfluidic chamber; ring shape; surface topography; surface wettability; transparent silicone oil; tunable optofluidic micro-iris; Apertures; Dielectrics; Electrodes; Glass; Ink; Optical attenuators; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170080
Filename
6170080
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