DocumentCode :
3546166
Title :
A fully integrated optofluidic micro-iris
Author :
Müller, P. ; Feuerstein, R. ; Zappe, H.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
7
Lastpage :
10
Abstract :
We report on a novel type of tunable optofluidic micro-iris composed of a microfluidic chamber filled with two immiscible liquid phases, a highly absorbing aqueous pigment dispersion and a mixture of transparent silicone oils. The pigment dispersion, which is forced to assume a ring shape using a combination of changes in surface wettability and topography, defines a circular optical aperture of high contrast. Using integrated electrowetting actuation, the aperture diameter can be tuned in four discrete steps. The advantages of the concept are the absence of any moving parts, compactness of design, low power consumption (<; 5 mW), moderate drive voltage (75 V), high uniform transmission (>; 86 %) and highly reliable and repeatable tunability.
Keywords :
integrated optoelectronics; micro-optomechanical devices; microactuators; microfluidics; oils; optical design techniques; optical fabrication; silicones; wetting; aqueous pigment dispersion; circular optical aperture; fully integrated optofluidic micro-iris; immiscible liquid phase; integrated electrowetting actuation; microfluidic chamber; ring shape; surface topography; surface wettability; transparent silicone oil; tunable optofluidic micro-iris; Apertures; Dielectrics; Electrodes; Glass; Ink; Optical attenuators; Tuning;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170080
Filename :
6170080
Link To Document :
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