Title :
An integrated RF MEMS tunable filter
Author :
Shim, Yonghyun ; Ruan, Jia ; Wu, Zhengzheng ; Rais-Zadeh, Mina
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper reports on a high-performance MEMS lumped bandpass filter continuously tuned from 1 GHz to 0.6 GHz using 12 electrostatically actuated MEMS capacitors. To demonstrate the benefits of MEMS technologies, a reconfigurable filter array is implemented on a PCB using SMT components and its performance is compared to that of the MEMS filter. Besides the advantage in size, the MEMS filter also exhibits lower loss and greater rejection. To become a viable solution for RF applications, other performance specifications of MEMS filters such as tuning speed and reliability need to be improved.
Keywords :
UHF filters; band-pass filters; capacitors; micromechanical devices; printed circuits; reliability; MEMS filter; MEMS technology; PCB; RF applications; SMT components; electrostatically actuated MEMS capacitors; high-performance MEMS lumped bandpass filter; integrated RF MEMS tunable filter; performance specifications; reconfigurable filter array; tuning reliability; tuning speed; Arrays; Filter banks; Filtering theory; Micromechanical devices; Microwave filters; Resonator filters;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170082
