An integrated RF MEMS tunable filter

Author

Shim, Yonghyun ; Ruan, Jia ; Wu, Zhengzheng ; Rais-Zadeh, Mina

Author_Institution

Univ. of Michigan, Ann Arbor, MI, USA

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

15

Lastpage

18

Abstract

This paper reports on a high-performance MEMS lumped bandpass filter continuously tuned from 1 GHz to 0.6 GHz using 12 electrostatically actuated MEMS capacitors. To demonstrate the benefits of MEMS technologies, a reconfigurable filter array is implemented on a PCB using SMT components and its performance is compared to that of the MEMS filter. Besides the advantage in size, the MEMS filter also exhibits lower loss and greater rejection. To become a viable solution for RF applications, other performance specifications of MEMS filters such as tuning speed and reliability need to be improved.

Keywords

UHF filters; band-pass filters; capacitors; micromechanical devices; printed circuits; reliability; MEMS filter; MEMS technology; PCB; RF applications; SMT components; electrostatically actuated MEMS capacitors; high-performance MEMS lumped bandpass filter; integrated RF MEMS tunable filter; performance specifications; reconfigurable filter array; tuning reliability; tuning speed; Arrays; Filter banks; Filtering theory; Micromechanical devices; Microwave filters; Resonator filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170082

Filename

6170082