Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators

Author

de Koninck, D.A. ; Lopez, F. Molina ; Briand, D. ; de Rooij, N.F.

Author_Institution

STI IMT SAMLAB, Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

64

Lastpage

67

Abstract

The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet-printed igniters capable of generating >;200 °C for ~1 s - sufficient for fuel combustion - and a low-temperature (120 °C) lamination technique using thick photodefinable epoxy sheets. Two different fuel mixtures and three different chamber volumes were tested. Balloon actuators (5 mm dia.) were successfully inflated, reaching over 5 mm in height. Maximum balloon heights were in good agreement with the semi-analytical model developed (28-35 % over prediction).

Keywords

combustion; microactuators; foil-level fabrication; fuel combustion; inkjet-printed pyroMEMS balloon actuators; nickel-plated balloon actuators; photodefinable epoxy sheets; Actuators; Combustion; Fabrication; Fuels; Ignition; Lamination; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170094

Filename

6170094