High-performance MEMS relay using a stacked-electrode structure and a levering and torsional spring for power applications

This paper presents a novel MEMS relay suitable for power switching, which is based on a unique stacked-electrode structure for very low contact resistance and a levering and torsional spring for enhancing a stand-off voltage (maximum drain voltage to withstand in the off-state) and contact endurance. The fabricated MEMS relay showed the contact resistance of less than 5 MΩ at 35 V of applied voltage, stand-off voltage of 360 V, which is the highest level among the electrostatically-actuated MEMS relays. Also, it was able to operate for 4.9 × 10⁵ cycles at 200 mA current level, and demonstrated the possibility of “resurrection of the relay from the stiction failure” for the first time.